US Patent Issued to ENTEGRIS on Sept. 9 for "Reticle pod inner pod having dissimilar material at contact surface interfaces" (Minnesota Inventor)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,406, issued on Sept. 9, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Reticle pod inner pod having dissimilar material at contact surface interfaces" was invented by Russ V. Raschke (Chanhassen, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Reticle pod inner pods include a cover and a baseplate, with the cover and the baseplate contacting one another at contact surfaces. The contact surfaces of the cover and the baseplate each include different materials. The different materials can each be metals. The different materials can differ in hardness. The difference in hardness can be 50 Brinell hardness or greater. One of the different mater...