US Patent Issued to ENTEGRIS on Oct. 7 for "Polishing of transition metals" (Florida Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,243, issued on Oct. 7, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Polishing of transition metals" was invented by Rajiv K. Singh (Newberry, Fla.), Sunny De (Gainesville, Fla.), Akshay Rajopadhye (Gainesville, Fla.) and Aditya D. Verma (Gainesville, Fla.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention provides compositions useful in the polishing of transition metal-containing surfaces typically found on microelectronic devices. In one aspect, the invention provides a composition comprising: a liquid carrier; titania abrasive particles, wherein the particles are at least partially coated with alumina or amorphous silica to provide...