US Patent Issued to ENTEGRIS on Oct. 14 for "Electrostatic chuck with a charge dissipation structure" (Massachusetts Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,636, issued on Oct. 14, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Electrostatic chuck with a charge dissipation structure" was invented by Jakub Rybczynski (Arlington, Mass.), Steven Donnell (Burlington, Mass.), Yan Liu (Lexington, Mass.), Caleb Minsky (Medfield, Mass.), Chandra Venkatraman (Tyngsboro, Mass.) and Carlo Waldfried (Middleton, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, the electrostatic chuck including a pattern of charge dissipation lines on an insulating layer, the lines having a first conductive lay...