ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,728, issued on Nov. 11, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Manifold for a substrate container" was invented by Matthew Fuller (Colorado Springs, Colo.), Colton J. Harr (Monument, Colo.) and Ian Dutro (Colorado Springs, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate container includes a shell defining an interior space and a manifold with an inlet and a gas distributing surface. The shell includes a front opening, a bottom wall, and a rear wall. The manifold is attached to the bottom wall and is closer to the front opening than the rear wall. The gas distributing surface is configured to distribute purge gas into the...