ALEXANDRIA, Va., June 17 -- United States Patent no. 12,312,685, issued on May 27, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Solids vaporizer" was invented by Benjamin Cardozo (Burnet, Texas) and Jacob Thomas (Leander, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers...