ALEXANDRIA, Va., June 17 -- United States Patent no. 12,312,127, issued on May 27, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Process carrier" was invented by Lim Joo Chai (Kulim, Malaysia) and Michael C. Zabka (New Prague, Minn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A process container includes flanges defining a plurality of slots. At least one of the flanges includes a tightener configured to contact a disc or wafer when the disc or wafer is inserted into one of the plurality of slots defined by said at least one of the plurality of flanges. The tightener projects outwards from said at least one of the plurality of flanges into said one of the plurality of slots. The tightener includes a ...