US Patent Issued to ENTEGRIS on May 27 for "Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container" (Colorado, Minnesota Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,315,749, issued on May 27, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying container" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Shawn D. Eggum (Lonsdale, Minn.) and Mark V. Smith (Colorado Springs, Colo.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of installing a purge fluid conditioning element into an interior space of a semiconductor substrate carrying container are described. The purge fluid conditioning element is installed from outside the semiconductor substrate carrying container through a port formed in one of the wa...