ALEXANDRIA, Va., June 12 -- United States Patent no. 12,297,531, issued on May 13, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Methods of preparing molybdenum-containing films" was invented by Benjamin R. Garrett (Leander, Texas), Michael Watson (Leander, Texas) and Pei Zhao (Leander, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "A process for depositing a molybdenum-containing film onto a microelectronic device substrate, which comprises exposing the substrate, in a reaction zone, to a compound of Formula (I) under vapor deposition conditions, thereby forming a molybdenum-containing film on the substrate. The molybdenum-containing films include one or more of molybdenum metal, molybdenum oxide...