US Patent Issued to ENTEGRIS on March 25 for "Precursor delivery systems, precursor supply packages, and related methods" (Connecticut Inventor)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,258,662, issued on March 25, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Precursor delivery systems, precursor supply packages, and related methods" was invented by Paolo Moreschini (Danbury, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal ...