ALEXANDRIA, Va., March 26 -- United States Patent no. 12,258,356, issued on March 25, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Group VI precursor compounds" was invented by David M. Ermert (Danbury, Conn.), Thomas H. Baum (New Fairfield, Conn.) and Robert Wright Jr. (Newtown, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The invention provides a facile process for preparing various Group VI precursor compounds useful in the vapor deposition of such Group VI metals onto solid substrates, especially microelectronic semiconductor device substrates. The process provides an effective means to obtain such volatile materials, which can then be sources of molybdenum, chromium, or tungsten-containing...