US Patent Issued to ENTEGRIS on March 18 for "Methods for depositing tungsten or molybdenum films" (Connecticut, Oregon Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,252,787, issued on March 18, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Methods for depositing tungsten or molybdenum films" was invented by Robert Wright Jr. (Newtown, Conn.), Thomas H. Baum (New Fairfield, Conn.), Bryan C. Hendrix (Danbury, Conn.), Shawn D. Nguyen (Danbury, Conn.), Han Wang (Hillsboro, Ore.) and Philip S. H. Chen (Bethel, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are vapor deposition methods for depositing metal films or layers onto a substrate, wherein the metal is molybdenum or tungsten; the methods involve organometallic precursor compounds that contain the metal and one or more carbon-containing ligan...