ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,625, issued on June 3, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Wafer container purge port assembly" was invented by Matthew A. Fuller (Colorado Springs, Colo.), Wei Sheng Hsu (Zhubei, Taiwan), Kobold Yang (Hsinchu, Taiwan) and Colton J. Harr (Monument, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A purge port assembly for a wafer container includes a purge module configured to allow inlet flow of purge gas and a transition portion disposed over an intermediate outlet of the purge module. The transition portion includes a receiver configured to receive the purge gas discharged from the purge module, an outlet connector configured to...