ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,364, issued on June 17, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Systems and methods for controlling precursor delivery" was invented by Michael Watson (Leander, Texas), Christopher Calhoun (Burnet, Texas), Cristian Ocampo (Cedar Park, Texas), Scott L. Battle (Cedar Park, Texas), Benjamin Cardozo (Burnet, Texas) and Benjamin R. Garrett (Leander, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for controlling precursor delivery. The systems and methods may comprise a precursor delivery vessel in fluid communication with a gas flow line. The precursor delivery vessel may comprise at least one tray containing a vapori...