ALEXANDRIA, Va., July 16 -- United States Patent no. 12,359,309, issued on July 15, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Group VI metal deposition process" was invented by Philip S. H. Chen (Bethel, Conn.), Shawn D. Nguyen (Danbury, Conn.), Bryan C. Hendrix (Danbury, Conn.) and Thomas H. Baum (New Fairfield, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a process for the vapor deposition of molybdenum or tungsten, and the use of molybdenum hexacarbonyl (Mo(CO)6) or tungsten hexacarbonyl (W(CO)6) for such deposition, e.g., in the manufacture of semiconductor devices in which molybdenum-containing or tungsten-containing films are desired. In accordance with one aspect of the in...