US Patent Issued to ENTEGRIS on July 1 for "Silicon precursor compounds and method for forming silicon-containing films" (South Korean, American Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,672, issued on July 1, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Silicon precursor compounds and method for forming silicon-containing films" was invented by Sungsil Cho (Anyang-si, South Korea), DaHye Kim (Suwon-si, South Korea), HwanSoo Kim (Hwaseong-si, South Korea), SooJin Lee (Suwon-si, South Korea) and Bryan C. Hendrix (Danbury, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are certain silicon precursor compounds which are useful in the formation of silicon-containing films in the manufacture of semiconductor devices, and more specifically to compositions and methods for forming such silicon-containing films, such as fi...