ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,214, issued on Feb. 3, was assigned to ENTEGRIS INC. (Billerica, Mass.).
"Pressure sensing and regulating system" was invented by Thines Kumar Perumal (Singapore), Aravind Vasanthakumar (Singapore), Subhash Guddati (Singapore), Montray Leavy (Singapore), Sanado Barolli (Bethlehem, Conn.) and Edward E. Jones (Woodbury, Conn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A high pressure fluid storage device with a pressure sensing and regulating system configured for delivery of vaporized solid and liquid precursor materials at a regulated pressure range. At least some components of the pressure regulating system is contained internally within the sto...