US Patent Issued to ENTEGRIS on Dec. 9 for "Precursor delivery systems for determining material levels" (Texas Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,471, issued on Dec. 9, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Precursor delivery systems for determining material levels" was invented by Scott L. Battle (Cedar Park, Texas), Benjamin Cardozo (Burnet, Texas) and Chase Parker (Burnet, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "A precursor delivery system for determining material levels and related methods can include an ampoule and at least one tray disposed in the ampoule. The at least one tray may be configured to hold an amount of a precursor material. A load cell assembly is also included. The load cell assembly may include a load cell. The load cell assembly may be coupled t...