US Patent Issued to ENTEGRIS on Dec. 2 for "Cleaning composition with molybdenum etching inhibitor" (American, South Korean Inventors)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,486,581, issued on Dec. 2, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Cleaning composition with molybdenum etching inhibitor" was invented by Daniela White (Ridgefield, Conn.), Michael L. White (Ridgefield, Conn.), Youngmin Kim (Suwon-si, South Korea), Akshay Rajopadhye (Gainesville, Fla.) and Atanu K. Das (Danbury, Conn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to removal compositions for at least partially removing post-chemical mechanical polishing (post-CMP) residues from the surface of a microelectronic device. The removal compositions comprise an aqueous base composition and various molybdenum etching in...