US Patent Issued to ENTEGRIS on April 8 for "Substrate with fluorinated yttrium coatings, and methods of preparing and using the substrates" (Massachusetts Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,270,104, issued on April 8, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Substrate with fluorinated yttrium coatings, and methods of preparing and using the substrates" was invented by Nilesh Gunda (North Chelmsford, Mass.), Jayasri Narayanamoorthy (Acton, Mass.) and Carlo Waldfried (Middleton, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described are substrates that include high aspect ratio surfaces and non-high aspect ratio surfaces, at least two coatings, one coating at high aspect ratio surfaces and a second coating at non-high aspect ratio surfaces, and having fluorinated outer surfaces; methods of preparing these coatings; and subs...