US Patent Issued to ENTEGRIS on April 15 for "Reticle pod including motion limiting features and method of assembling same" (Minnesota Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,276,924, issued on April 15, was assigned to ENTEGRIS INC. (Billerica, Mass.).

"Reticle pod including motion limiting features and method of assembling same" was invented by Russ V. Raschke (Chanhassen, Minn.) and Brian Wiseman (Glencoe, Minn.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. ...