ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,392, issued on Dec. 9, was assigned to ENKRIS SEMICONDUCTOR INC. (Suzhou, China).
"Graphite disc" was invented by Kai Cheng (Suzhou, China) and Liyang Zhang (Suzhou, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a graphite disc solving a problem of poor performance uniformity of the epitaxial wafer, which is obtained during material epitaxial growth by using the graphite disc. The graphite disc includes a graphite disc body, where the graphite disc body includes a groove and a plurality of projections on a bottom wall of the groove, and the plurality of projections divide the groove into a plurality of independent regions. Accordi...