ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,678, issued on Nov. 11, was assigned to EN2CORE TECHNOLOGY INC. (Daejeon, South Korea).
"Plasma process system for multi-station" was invented by Sae Hoon Uhm (Hwaseong-si, South Korea), Dong Jegal (Yongin-si, South Korea), Yeonghoon Sohn (Daejeon, South Korea), Gyueng Hyuen Choe (Chungcheongbuk-do, South Korea), Se Hong Park (Daejeon, South Korea) and Jin Huh (Daejeon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment of the present disclosure, there can be provided a plasma processing system for multi-station, the system including a processing chamber including at least two or more stations, one plasma generato...