ALEXANDRIA, Va., June 6 -- United States Patent no. 12,281,130, issued on April 22, was assigned to EGTM Co. Ltd. (South Korea).
"Organometallic precursor compound" was invented by Sung Jun Ji (Gyeonggi-do, South Korea), Sun Young Baik (Gyeonggi-do, South Korea) and Tae Young Lee (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present specification provides an organic group 4 metal precursor compound and a method for forming a thin film using the same."
The patent was filed on Nov. 22, 2021, under Application No. 17/532,612.
*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnet...