ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,447,438, issued on Oct. 21, was assigned to Edwards Ltd. (Burgess Hill, Great Britain).
"Abatement method and apparatus" was invented by Stuart Mark Lampert (Clevedon, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition ...