ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,631, issued on Jan. 27, was assigned to Edwards Ltd. (Burgess Hill, Great Britain).
"Optimising operating conditions in an abatement apparatus" was invented by Michael Colin Graham (Burgess Hill, Great Britain), Andrew James Seeley (Burgess Hill, Great Britain) and Duncan Michael Price (Burgess Hill, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containin...