ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,540,731, issued on Feb. 3, was assigned to Edwards Ltd..
"Abatement apparatus" was invented by Andrew James Seeley (Clevedon, Great Britain).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multipl...