ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,464, issued on Nov. 11, was assigned to Edwards Japan Ltd. (Chiba, Japan).
"Vacuum pump and vacuum exhaust apparatus" was invented by Takashi Kabasawa (Chiba, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A vacuum pump includes a heater, purge gas introduction ports, a purge gas valve, and an exhaust valve. In a cleaning operation mode, at least one of the heater, the purge gas valve, and the exhaust valve is controlled, and a pressure in at least a part of an interior of the turbomolecular pump is increased to a pressure region with which a temperature is greater than or equal to a sublimation temperature of the deposits in the turbomolecula...