ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,442, issued on Nov. 11, was assigned to Edwards Japan Ltd. (Yachiyo, Japan).
"Cleaning apparatus for vacuum exhaust system" was invented by Takashi Kabasawa (Yachiyo, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A cleaning apparatus for a vacuum exhaust system capable of preventing redeposition of deposits on a downstream side of a vacuum pump is provided. A cold trap capable of causing deposits to be formed by cooling gas containing a sublimation component, at least one first vacuum pump disposed upstream of the cold trap, at least one first piping connecting the first vacuum pump to the cold trap, at least one second vacuum pump disposed d...