US Patent Issued to Edwards Japan on Dec. 30 for "Vacuum pump, vacuum pump controller, and remote controller" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,090, issued on Dec. 30, was assigned to Edwards Japan Ltd. (Yachiyo, Japan).

"Vacuum pump, vacuum pump controller, and remote controller" was invented by Masayuki Hashimoto (Yachiyo, Japan), Yoshinobu Ohtachi (Yachiyo, Japan), Yasushi Maejima (Yachiyo, Japan) and Tsutomu Takaada (Yachiyo, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the...