US Patent Issued to EBARA on Sept. 2 for "Transfer apparatus, cleaning module, and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,403,507, issued on Sept. 2, was assigned to EBARA Corp. (Tokyo).

"Transfer apparatus, cleaning module, and substrate processing apparatus" was invented by Asagi Matsugu (Tokyo), Akihiro Yazawa (Tokyo), Manato Furusawa (Tokyo), Hideharu Aoyama (Tokyo), Ayumu Saito (Tokyo), Yusuke Sasaya (Tokyo), Kenichi Kobayashi (Tokyo), Yasuyuki Miyasawa (Tokyo), Tsuyoshi Soma (Tokyo) and Keiichi Nojo (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "To achieve a cleaning module and a substrate processing apparatus that can improve the cleaning capability for a substrate with a simple structure.A cleaning module includes a first transfer mechanism 210-1, an ultraso...