ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,221, issued on Nov. 25, was assigned to EBARA Corp. (Tokyo).
"Pre-wet process method" was invented by Kazuhito Tsuji (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a pre-wet process method by which a pre-wet process can be effectively performed on a substrate without affecting throughput. The pre-wet process method for performing the pre-wet process before performing a plating process on a substrate in a plating apparatus is provided. The pre-wet process method includes a step of calculating a maximum process time in a pre-wet module based on a rate limiting step of limiting a rate of a process in the whole plating apparatus, a st...