US Patent Issued to EBARA on March 4 for "Electron beam irradiation apparatus with overlapping beam columns and helping columns" (Japanese Inventor)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,710, issued on March 4, was assigned to EBARA Corp. (Tokyo).

"Electron beam irradiation apparatus with overlapping beam columns and helping columns" was invented by Ryo Tajima (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A electron beam irradiation apparatus 1 includes a helping column determination unit 11 that determines, as a helping column, a column having a main irradiation area that is not included in a target irradiation area to be irradiated with an electron beam from among a plurality of columns 2 when information on the target irradiation area is input, and a helped column determination unit 12 that determines, as a helped column ...