US Patent Issued to EBARA on March 18 for "Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool" (Japanese Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,251,738, issued on March 18, was assigned to EBARA Corp. (Tokyo).

"Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool" was invented by Megumi Uno (Tokyo), Akira Fukunaga (Tokyo), Chikako Takatoh (Tokyo) and Yumiko Nakamura (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cleaning apparatus performing cleaning treatment for a washing tool used for substrate washing by causing the washing tool to contact with a cleaning member while supplying a washing liquid to the washing tool includes a liquid extraction unit that extracts the washing liquid remaining in the washing tool or the wa...