US Patent Issued to EBARA on June 24 for "Break-in processing apparatus and break-in processing method" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,337,438, issued on June 24, was assigned to EBARA Corp. (Tokyo).

"Break-in processing apparatus and break-in processing method" was invented by Osamu Nabeya (Tokyo) and Kenichi Akazawa (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A break-in processing apparatus is disclosed, which can reliably perform a break-in process for an elastic membrane without reducing a utilization rate of a polishing apparatus. The break-in processing apparatus includes a stage to which an elastic membrane assembly including a carrier and an elastic membrane attached to the carrier is placed; a break-in determination module facing the elastic membrane placed to the st...