US Patent Issued to EBARA on July 15 for "Liquid feeder and polishing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,358,098, issued on July 15, was assigned to EBARA Corp. (Tokyo).

"Liquid feeder and polishing apparatus" was invented by Kuniaki Yamaguchi (Tokyo), Masayuki Tamura (Tokyo), Kenji Shinkai (Tokyo), Soichi Isobe (Tokyo) and Yusuke Mochida (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A liquid feeder includes: a first arm having a first nozzle; a second arm having a second nozzle; a first rotation shaft supporting a proximal end part of the first arm; a second rotation shaft supporting a proximal end part of the second arm; a first rotation driver configured to rotate the first rotation shaft to turn the first arm from a fluid feed position to a ret...