US Patent Issued to EBARA on July 1 for "Prewet module and prewet method" (Japanese Inventor)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,347,697, issued on July 1, was assigned to EBARA Corp. (Tokyo).

"Prewet module and prewet method" was invented by Masaya Seki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "Efficiency of a cleaning process and a degassing process for a surface to be processed of a substrate is improved.A pre-wet module 200 includes a stage 220, a rotation mechanism 224, a pre-wet chamber 260, an elevating mechanism 230, a degassing liquid supply member 204, a nozzle 268, and a cleaning liquid supply member 202. The stage 220 is configured to hold a back surface of a substrate WF with a surface to be processed WF-a facing upward. The rotation mechanism 224 is confi...