US Patent Issued to EBARA on Feb. 3 for "Method and computer program product for identifying element which limits throughput of plating apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,190, issued on Feb. 3, was assigned to EBARA Corp. (Tokyo).

"Method and computer program product for identifying element which limits throughput of plating apparatus" was invented by Daiki Iwamoto (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An element which limits throughput of a plating apparatus is identified. A method for identifying an element which limits throughput of a plating apparatus is provided. The method comprises: a step for creating a time chart which represents process schedules of plural processing units and one or plural transfer apparatuses; a step for calculating, based on the time chart, at least one of an operation rat...