ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,377,516, issued on Aug. 5, was assigned to EBARA Corp. (Tokyo).
"Polishing head and polishing apparatus" was invented by Makoto Kashiwagi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed subject matter relates to a polishing head for pressing a polishing tool against a substrate, such as a wafer. Further, the disclosed subject matter relates to a polishing apparatus for polishing a substrate with such a polishing head. A polishing head includes an annular elastic member configured to press a polishing tool against the substrate, and a pressing-tool body having a pressing surface configured to press the polishing tool against the substr...