ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,707, issued on April 29, was assigned to EBARA Corp. (Tokyo).
"Substrate holder" was invented by Matsutaro Miyamoto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "One object of this application is to provide an advanced substrate holder including a clamper. A substrate holder for holding a substrate by interposing the substrate between frames is disclosed. The substrate holder includes a front frame, a rear frame, and one or a plurality of clampers. Each of the clampers includes a hook portion including a hook base and a hook main body, and a plate including at least one claw. At least one of the clampers includes the plate including a first c...