US Patent Issued to Eagle Harbor Technologies on Oct. 28 for "Nanosecond pulser RF isolation for plasma systems" (Washington Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,456,604, issued on Oct. 28, was assigned to Eagle Harbor Technologies Inc. (Seattle).

"Nanosecond pulser RF isolation for plasma systems" was invented by Timothy Ziemba (Bainbridge Island, Wash.) and Kenneth Miller (Seattle).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the invention include a plasma system. The plasma system includes a plasma chamber; an RF driver configured to drive bursts into the plasma chamber with an RF frequency; a nanosecond pulser configured to drive pulses into the plasma chamber with a pulse repetition frequency, the pulse repetition frequency being less than the RF frequency; a high pass filter disposed betwee...