ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,130, issued on July 15, was assigned to E.A. Fischione Instruments Inc. (Export, Pa.).
"System and method for uniform ion milling" was invented by Paul E Fischione (Export, Pa.), Joseph M Matesa (Spring Church, Pa.), Junhai Liu (North Huntingdon, Pa.) and Michael F Boccabella (Irwin, Pa.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for the precise and uniform material removal or delayering of a large area of a sample is provided. The size of the milled area is controllable, ranging from sub-millimeter to multi-millimeter scale and the depth resolution is controllable on the nanometer scale. A controlled singularly charged ion b...