ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,435,969, issued on Oct. 7, was assigned to DISCO Corp. (Tokyo).
"Thickness measuring apparatus" was invented by Keiji Nomaru (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measuring instrument includes a light source, a scanning mirror configured to position the light emitted by the light source at coordinates specified by an X-coordinate and a Y-coordinate on a plate-shaped workpiece held on a chuck table, a diffusing film onto which reflected light is projected, the reflected light forming a spectral interference waveform by being reflected from a top surface and an undersurface of the plate-shaped workpiece held on the chuck table, a light de...