ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,454,076, issued on Oct. 28, was assigned to DISCO Corp. (Tokyo).
"Substrate manufacturing method" was invented by Hayato Iga (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate manufacturing method of manufacturing a substrate from a workpiece is disclosed. A laser beam is first split and condensed to form a plurality of focal points aligned side by side along a first direction, and with the focal points positioned inside the workpiece, the focal points and the workpiece are moved relative to each other along a second direction orthogonal to the first direction such that a separation layer is formed. A region of the focal points and the wo...