ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,389, issued on Oct. 21, was assigned to DISCO Corp. (Tokyo).
"Conveying apparatus and conveying method of substrate" was invented by Yuto Maeda (Tokyo) and Naoaki Tadami (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a conveying apparatus having a holding surface that holds a held surface of a substrate to convey the substrate. The conveying apparatus includes a holding pad that gets contact with an outer circumferential part of the held surface of the substrate or a side surface of the substrate and forms a space to be filled with water between the held surface of the substrate and the holding surface, a movement unit that ...