ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,479,053, issued on Nov. 25, was assigned to DISCO Corp. (Tokyo).
"Holding table assembly and processing method" was invented by Kentaro Iizuka (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A holding table assembly has a base that includes three or more cylinder sections spaced apart at regular intervals in a circumferential direction, a circular recess formed at an upper part thereof, and a flow channel communicating with the cylinder sections and the circular recess. A holding table includes a holding surface inserted into the circular recess of the base that holds an ingot under suction. A circular plate has a plurality of minute holes and ins...