ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,208,468, issued on Jan. 28, was assigned to DISCO Corp. (Tokyo).
"Processing apparatus" was invented by Natsuko Hanamura (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus includes a delivery unit for delivering a workpiece between a cassette placed on a cassette rest and a chuck table and a measuring unit for measuring a thickness of the workpiece. The delivery unit includes a base having a non-contact-type suction holder for ejecting air to develop a negative pressure to attract and hold the workpiece under suction out of contact therewith, and a moving unit for moving the base. The height of the non-contact-type suction hold...