ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,830, issued on Jan. 27, was assigned to DISCO Corp. (Tokyo).
"Substrate manufacturing method" was invented by Yuki Ikku (Tokyo) and Hayato Iga (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A peeling layer is formed in a workpiece in a state in which a laser beam is condensed so as to have a larger length along an indexing feed direction than a length along a processing feed direction. In this case, cracks included in the peeling layer extend along the indexing feed direction easily. It is consequently possible to increase a relative moving distance (index) between a place where the laser beam is condensed and the workpiece in an indexing fee...