ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,371, issued on Dec. 9, was assigned to DISCO Corp. (Tokyo).
"Processing method" was invented by Tsubasa Hirose (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a processing method of a workpiece including a necessary region and an unnecessary region. The processing method includes a protective wall forming step of irradiating a region that defines the boundary between the necessary region and the unnecessary region with a laser beam with a wavelength that has transmissibility with respect to the workpiece and forming a plurality of shield tunnels composed of a fine pore and a modified tube that surrounds the fine pore, thereby ...