US Patent Issued to DISCO on Dec. 30 for "Detection method of resistivity and processing method of plate-shaped workpiece" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,508,674, issued on Dec. 30, was assigned to DISCO Corp. (Tokyo).

"Detection method of resistivity and processing method of plate-shaped workpiece" was invented by Atsushi Ueki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detection method of resistivity is a detection method of resistivity in which resistivity of a plate-shaped workpiece having a back surface and a front surface on a side opposite to the back surface is detected. The detection method includes an interference waveform acquisition step of irradiating the back surface of the plate-shaped workpiece with light from a light source and acquiring an interference waveform between light...