ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,256, issued on May 20, was assigned to DEVICEENG Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate treatment apparatus having bowl assembly" was invented by Taek Youb Lee (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a substrate treatment apparatus including: a substrate support assembly having a spin head onto which a substrate is seated; a fluid supply unit for supplying a fluid to the substrate; a bowl assembly having a plurality of bowls overlaid one another outwardly in a radial direction thereof to surround the substrate support assembly; and an ascending and descending unit...